Shuichi Murakami

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:30 AM - 11:30 AM PA6 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[7a-PA6-1~14] 6.1 Ferroelectric thin films

9:30 AM - 11:30 AM

[7a-PA6-11] NLD Dry Etching Process of Lead-free Ferroelectric BeFeO₃ Film for Piezoelectric MEMS
Vibration Energy Harvester

〇Shuichi Murakami¹, Kazuo Satoh¹, Masaaki Aramaki², Takeshi Yoshimura², Norifumi Fujimura² (1.ORIST, 2.Osaka Pref. Univ.)