Hiroaki Kataoka

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 12:00 PM S22 (Palace B)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[7a-S22-1~11] 13.8 Compound and power electron devices and process technology

9:45 AM - 10:00 AM

[7a-S22-4] A proposal of defect density extraction method for GaN epi-wafers

〇Hiroaki Kataoka¹, Takuya Hoshii¹, Iriya Muneta¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui², Hiroshi Iwai², Kuniyuki Kakushima¹, Taiki Yamamoto³ (1.Tokyo Tech, 2.Tokyo Tech IIR, 3.Sumitomo Chem)

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