Hideki Sakurai

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 12:00 PM S22 (Palace B)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[7a-S22-1~11] 13.8 Compound and power electron devices and process technology

11:15 AM - 11:30 AM

[7a-S22-9] CL properties of Mg-ion implanted GaN depending on thermal activation process

〇Hideki Sakurai^1,3, Shinji Yamada^1,3, Masato Omori¹, Yukihiro Furukawa³, Hideo Suzuki³, Jun Suda^1,2, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.Nagoya Univ., 3.ULVAC ISET)

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