Kiyoshi Uchiyama

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:15 PM - 5:00 PM A204 (204)

Oral presentation
| CS Code-sharing session
| 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

[7p-A204-1~14] 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

2:30 PM - 2:45 PM

[7p-A204-6] Evaluation of electrical properties of SrTa₂O₆high-k thin films deposited by rf magnetron sputtering and their surface roughness control

Takanori Takahashi¹, Takeshi Hoga¹, Kanji Yasui², Uraoka Yukiharu³, 〇Kiyoshi Uchiyama¹ (1.NIT, Tsuruoka, 2.Nagaoka Univ. Tech., 3.NAIST)