Shuya Murakami

→ Search for Shuya Murakami in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:15 PM - 2:45 PM A402 (402+403)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[7p-A402-1~6] 8.4 Plasma etching

1:45 PM - 2:00 PM

[7p-A402-3] Etching characteristics of TPCO using O₂/Ar plasma

〇Shuya Murakami¹, Shusuke Yamashita¹, Shinya Yoneda¹, Kazuo Takahashi¹, Takeshi Yamao¹ (1.Kyoto Institute of Technology)