The 78th JSAP Autumn Meeting, 2017

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Oral presentation

8 Plasma Electronics » 8.4 Plasma etching

[7p-A402-1~6] 8.4 Plasma etching

Thu. Sep 7, 2017 1:15 PM - 2:45 PM A402 (402+403)

Tetsuya Tatsumi(Sony)

1:45 PM - 2:00 PM

[7p-A402-3] Etching characteristics of TPCO using O2/Ar plasma

〇Shuya Murakami1, Shusuke Yamashita1, Shinya Yoneda1, Kazuo Takahashi1, Takeshi Yamao1 (1.Kyoto Institute of Technology)

Keywords:Etching, TPCO