Yoshiki Iizawa

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA1 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[8a-PA1-1~17] 6.2 Carbon-based thin films

9:30 AM - 11:30 AM

[8a-PA1-13] Fabrication and structural analysis of high-nitrogen containing a-CN_x:H thin films using radio-frequency plasma CVD of CH₃CN-N₂-Ar gas mixture

〇Yoshiki Iizawa¹, Hidetoshi Saitoh¹, Haruhiko Ito¹ (1.Nagaoka Univ. of Tech.)