Kohei Takizawa

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA1 (P)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[8a-PA1-1~17] 6.2 Carbon-based thin films

9:30 AM - 11:30 AM

[8a-PA1-3] Effect of soft-ICP etching proess on diamond semiconductor surface by ARXPS

〇(M2)Kohei Takizawa¹, Yukako Kato², Toshiaru Makino², Satoshi Yamasaki², Hiroshi Nohira¹ (1.Tokyo City Univ., 2.AIST)