Kouki Imoto

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB4 (P)

Poster presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[8a-PB4-1~20] 8.3 Plasma deposition of thin film and surface treatment

9:30 AM - 11:30 AM

△ [8a-PB4-13] Fabrication of SiC films on Si(111) substrates via impurity mediated crystallization

〇Kouki Imoto¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1.Kyushu Univ.)