Tetsuya Sato

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB4 (P)

Poster presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[8a-PB4-1~20] 8.3 Plasma deposition of thin film and surface treatment

9:30 AM - 11:30 AM

[8a-PB4-16] Formation of a-C:F by plasma irradiation on the PFC condensation layer and PTFE surface modification

〇Tetsuya Sato¹, Kouta Yamai¹, Kyouhei Morikawa¹, Haruka Soga¹, Chiaya Yamamoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹ (1.Univ. of Yamanashi)