Yoshinobu Matsuda

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB4 (P)

Poster presentation
| 8 Plasma Electronics
| 8.3 Plasma deposition of thin film and surface treatment

[8a-PB4-1~20] 8.3 Plasma deposition of thin film and surface treatment

9:30 AM - 11:30 AM

[8a-PB4-19] Deposition of Ga doped ZnO films using narrow-gap RF magnetron sputtering

〇Yoshinobu Matsuda¹, Kohei Sakamoto¹, Naoki Matsuo¹, Tomohiro Furusato¹, Takahiko Yamashita¹ (1.Nagasaki Univ.)