Ryo Yokogawa

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8a-C21-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

11:00 AM - 11:15 AM

△ [8a-C21-8] Evaluation of Anisotropic Biaxial Stresses in the Ar⁺ ion irradiated Si Nanowire Covered with Oxide Film by Water-immersion Raman Spectroscopy

〇Ryo Yokogawa^1,3, Shuichiro Hashimoto², Motohiro Tomita^1,2,4, Takanobu Watanabe², Atsushi Ogura¹ (1.Meiji Univ., 2.Waseda Univ., 3.JSPS Research Fellow DC, 4.JSPS Research Fellow PD)

Fri. Sep 8, 2017 1:15 PM - 3:00 PM C19 (C19)

Oral presentation
| 15 Crystal Engineering
| 15.5 Group IV crystals and alloys

[8p-C19-1~7] 15.5 Group IV crystals and alloys

2:30 PM - 2:45 PM

[8p-C19-6] Investigation of Phonon Deformation Potentials in SiGe Using Bulk SiGe and Oil-immersion Raman Spectroscopy

〇Ryo Yokogawa^1,4, Kazuma Takeuchi¹, Tatsumi Murakami¹, Koji Usuda², Ichiro Yonenaga³, Atsushi Ogura¹ (1.Meiji Univ., 2.Toshiba Corp., 3.Tohoku Univ., 4.JSPS Research Fellow DC)

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