Wataru Itaya

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Speaker, Author, Co-Author

Fri. Sep 8, 2017 1:30 PM - 3:30 PM PA2 (P)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[8p-PA2-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

△ [8p-PA2-4] Alleviation of Extrinsic State and S-factor for Ge Contact by Amorphous Interlayer and N atom

〇Wataru Itaya¹, Kohei Nakae¹, Keisuke Yamamoto¹, Dong Wang¹, Hiroshi Nakashima² (1.Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 2.GIC, Kyushu Univ.)

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