Kuniyuki Kakushima(Titech), Masato Sone(Titech)
Kuniyuki Kakushima
Chairperson, etc.
Wed. Sep 6, 2017 1:45 PM - 7:00 PM C21 (C21)
- Oral presentation
- | 13 Semiconductors
- | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology