The 78th JSAP Autumn Meeting, 2017

Masahide Goto

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Chairperson, etc.

Wed. Sep 6, 2017 9:15 AM - 12:15 PM C21 (C21)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6a-C21-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Kazuyoshi Ueno(Shibaura Inst. of Tech), Masahide Goto(NHK)