The 78th JSAP Autumn Meeting, 2017

Kazuyoshi Ueno

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Chairperson, etc.

Thu. Sep 7, 2017 1:45 PM - 5:25 PM C19 (C19)

  • Symposium (Oral)
  • | Symposium
  • | Challenges for 'multi-scale' processing - dry, wet, or else?...

[7p-C19-1~10] Challenges for 'multi-scale' processing - dry, wet, or else?...

Kazuyoshi Ueno(Shibaura Inst. of Tech), Toshiyuki Sanada(Shizuoka Univ.)

Wed. Sep 6, 2017 9:15 AM - 12:15 PM C21 (C21)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6a-C21-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Kazuyoshi Ueno(Shibaura Inst. of Tech), Masahide Goto(NHK)