The 78th JSAP Autumn Meeting, 2017

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Oral presentation

13 Semiconductors » 13.3 Insulator technology

[5a-C11-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Tue. Sep 5, 2017 9:00 AM - 12:00 PM C11 (Office 1)

Masato Koyama(TOSHIBA), Akio Ohta(Nagoya Univ.)

11:30 AM - 11:45 AM

[5a-C11-10] Fabrication and Evaluation of HfO2/Si Structure by Chemical Oxidation Method on Metal Hf/Si Structure

〇Hiroki Oba1, Yoshitaka Iwazaki1, Tomo Ueno1 (1.Tokyo Univ. of Agri. & Tech.)

Keywords:semiconductor