9:45 AM - 10:00 AM
[5a-C11-4] The effect of Post Metallization Annealing for GeO2/Ge structures using CVD method
Keywords:semiconductor
Presentation information
Oral presentation
13 Semiconductors » 13.3 Insulator technology
[5a-C11-1~11] 13.3 Insulator technology
6.1と13.3と13.5のコードシェアセッションあり
Tue. Sep 5, 2017 9:00 AM - 12:00 PM C11 (Office 1)
Masato Koyama(TOSHIBA), Akio Ohta(Nagoya Univ.)