9:30 AM - 9:45 AM
[5a-S44-3] Evaluation of second order light from BL-11D, the Photon Factory around a wavelength of 13.5 nm
Keywords:high order harmonic, monochromator, multilayer mirror
BL-11D, the Photon Factory is dedicated to evaluation of EUV and soft X-ray optical elements. For quantitative measurements carried out at such beamlines high spectral purity is required, especially around a wavelength of 13.5 nm used in EUVL. At 13.3 nm, the second order light of a wavelength of 6.6 nm was evaluated. A La/C multilayer mirror having a reflection peak at 6.6 nm was used. The monochromator was scanned around 13.3 nm but any reflection peak signal which would appear when the second order light existed could not be detected. Thus high purity of the monochromator output was confirmed.