[5a-S44-1~11] 【CS.9】7.1 & 7.4 Code-sharing session

[5a-S44-4] Development of back-illuminated soft X-ray imaging device with a 1.4x1.4 μm² pixel size

〇Takeo Ejima¹, Tadashi Hatano¹ (1.IMRAM, Tohoku Univ.)

Keywords:Soft X-ray imaging device

An imaging device operating in soft X-ray (SX) wavelength region was fabricated by using a commercially available one having a pixel size of 1.4 x 1.4 μm² and operating in visible wavelength region. The imaging device was evaluated at BL-11D beamline in Photon Factory, and the operation of the imaging device was confirmed in SX wavelength region. The relative quantum efficiency of the imaging device was experimentally obtained in the light energy range from 250 eV to 1000 eV.