[5a-S44-1~11] 【CS.9】7.1 & 7.4 Code-sharing session

[5a-S44-5] High-Diffraction-Efficiency Wide-Acceptance-Angle Laminar-Type Diffraction Gratings Overcoated with Oxide Films for Boron-K Emission Spectroscopic Measurements

〇Masato Koike¹, Tadashi Hatano², Alexander Pirozhkov¹, Masami Terauchi², Ryuichi Ukita³, Hiroaki Nishihara³, Hideyuki Sasai³, Tetsuya Nagano³ (1.QuBS, National Inst.for Quantum and Radiological Sci. and Tech., 2.IMRM, Tohoku Univ., 3.Device Dept., Shimadzu Corp.)

Keywords:soft X-ray, diffraction grating, multilayer

For the purpose of increasing the diffraction efficiency and spectral flux at B-K emission spectra, TiO₂ or CeO₂ layer is overacted on the surface of soft X-ray laminar-type Ni-coated grating. The calculated optimum film thickness and incident angle are 22.0 nm and 30.2 nm, and 85.262 ° and 84.496 ° for TiO₂ and CeO₂ gratings, respectively. Experimental results will be presented at the meeting.