[5a-S44-1~11] 【CS.9】7.1 & 7.4 Code-sharing session

[5a-S44-7] Ablation of EUV Multilayers Using Femto-Second Extreme Ultra-Violet Pulses

〇Satoshi Ichimaru¹, Masaharu Nishikino², Masahiko Ishino², Hiroo Kinoshita³, Yuichi Inubushi⁴, Takeshi Higashiguchi⁵, Masakazu Washio⁶, Kazuyuki Sakaue⁷, Shigeki Owada⁸, Tadashi Hatano⁹, Masatoshi Hatayama¹, Tadayuki Ohchi¹, Dinh-Thanh Hung², Akira Kon⁴, Hiroyuki Hara⁵, Shun Yamauchi⁵, Takuto Ogura⁵, Natumi Shinozaki⁵, Yutaka Koshiba⁵, Takashi Takahashi⁶, Takehiro Nishidome⁶, Satoshi Oku¹ (1.NTT-AT, 2.QST Kansai, 3.Univ. Hyogo, 4.JASRI, 5.Utsunomiya Univ., 6.RISE, Waseda Univ., 7.WIAS, Waseda Univ., 8.RIKEN, 9.IMRAM Tohoku Univ.)

Keywords:EUV multilayer, Ablation, Stability