2:30 PM - 2:45 PM
[5p-C11-4] Correlation between Electrical Dipole Moment and Ratio of Oxygen Density at High-k Dielectric/SiO2 Interface as Evaluated by XPS
Keywords:XPS, electrical dipole moment, high-k/SiO2 interface
Presentation information
Oral presentation
13 Semiconductors » 13.3 Insulator technology
[5p-C11-1~10] 13.3 Insulator technology
6.1と13.3と13.5のコードシェアセッションあり
Tue. Sep 5, 2017 1:45 PM - 4:30 PM C11 (Office 1)
Masao Inoue(Renesas), Takanobu Watanabe(Waseda Univ.)