The 78th JSAP Autumn Meeting, 2017

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[5p-S41-1~20] 7.2 Applications and technologies of electron beams

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

Tadahiro Kawasaki(JFCC), Nobuhiro Ishikawa(NIMS), Shigekazu Nagai(Mie Univ.)

2:00 PM - 2:15 PM

[5p-S41-3] Li analysis of the Ar sputtered Li compounds using REELS with HSA

Noboru Taguchi1, Akihiro Tanaka2, Konomi Yoshida2, Kenichi Tsutsumi2, Yasushi Maeda1, Shingo Tanaka1 (1.AIST RIECEN, 2.JEOL)

Keywords:EELS, Electron Microscopy, Lithium