[5p-S44-1~10] 【CS.9】7.1 & 7.4 Code-sharing session

[5p-S44-8] Long-term annealing for surface waviness improvement of ultra-lightweight X-ray optics

〇Daiki Ishi¹, Yuichiro Ezoe¹, Kumi Ishikawa², Masaki Numazawa¹, Kazuma Takeuchi¹, Masaru Terada¹, Maiko Fujitani¹, Takahito Itoyama¹, Ryota Otsubo¹, Aoto Fukushima¹, Takaya Ohashi¹, Yoshiaki Kanamori³, Kazuhisa Mitsuda² (1.Tokyo Metropolitan Univ., 2.ISAS, 3.Tohoku Univ.)

Keywords:MEMS, X-ray optics, annealing

We are developing a ultra-lightweight X-ray optics. The optics utilizes sidewalls of micro pores fabricated with silicon dry etching as X-ray mirrors. We conducted a 10-hour annealing to improve surface waviness and evaluated the surface shape by using an X-ray beam. As a result, we were convinced that a required angular resolution HPD <10 arcmin will be accomplished by conducting a >100-hour annealing.