Gas temperature estimation of microcrystalline-slicon-film-growth process under high pressure in VHF PECVD

Presentation information

Oral presentation

16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

Wed. Sep 6, 2017 9:00 AM - 11:45 AM A204 (204)

10:30 AM - 10:45 AM

〇Yasushi Sobajima¹, Daisuke Kitano¹, Haruka Kubota¹, Kouhei Kodama¹, Akihisa Matsuda¹, Hiroaki Okamoto¹ (1.Osaka Univ.)

Keywords:Solar cell, microcrystalline silicon