[6a-C14-1~14] 3.13 半導体光デバイス

▼ [6a-C14-3] Multi-Layer All Sol-Gel Fabrication Technique on Bulk Silicon toward Vertical Coupler

Ahmad Syahrin Idris¹、〇(M2)Sampad Ghosh¹、Haisong Jiang¹、Kiichi Hamamoto¹ (1.I-Eggs, Kyushu University)

キーワード：Thermal annealing, Deformation (crack), Sol-gel

A stacked multi-layer all sol-gel fabrication technique using ZnO and SiO₂ sol-gel on bulk Si is proposed to enable the realization of vertical coupling. However, issues regarding the deformation (crack) was appeared on the sol-gel surface during multilayer fabrication. These problems were investigated thoroughly and found a slow cooling process is a good option to form a crack free surface. By this way, stacking of multiple layers by all sol-gel based fabrication technique was successfully done.