11:00 AM - 11:15 AM
[6a-C21-8] In Situ Atomic Force Microscopy Observation of Electromigrated Au Nanowires during Voltage Feedback Process for Investigation of Local Temperature
Keywords:electromigration, atomic force microscopy, nanowire
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[6a-C21-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Wed. Sep 6, 2017 9:15 AM - 12:15 PM C21 (C21)
Kazuyoshi Ueno(Shibaura Inst. of Tech), Masahide Goto(NHK)