The 78th JSAP Autumn Meeting, 2017

Presentation information

Poster presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[6a-PA7-1~2] 7.3 Micro/Nano patterning and fabrication

Wed. Sep 6, 2017 9:30 AM - 11:30 AM PA7 (P)

9:30 AM - 11:30 AM

[6a-PA7-2] Fabrication of periodic nanostructure of conductive thin films on atomically stepped flexible substrate by thermal nanoimprint technique.

Shiori Yamada1, Risa Goto1, Taichiro Kinoshita1, Katsuyoshi Komatsu2, Tomoyasu Taniyama2, Satoru Kaneko3,1, Akifumi Matsuda1, Mamoru Yoshimoto1 (1.Tokyo Tech. Materials, 2.Tokyo Tech. LMS, 3.KISTEC)

Keywords:thermal nanoimprint, conductive thin film, periodic nanostructure

本研究では、フレキシブル基板を用いた電子・光学デバイスの要素技術の創成を目的として、超平坦ポリマー上の導電性薄膜に対する微細周期パターン形状の作製と導電特性に与える影響について検討した。