[6a-PA9-1~11] 13.3 Insulator technology

[6a-PA9-9] Thermal annealing effect on paramagnetic defects in silicon nitride films(Ⅴ)

〇(M1)Kenya Niisato¹, Osamu Kazumi¹, Kiyoteru Kobayashi¹ (1.Tokai Univ.)

Keywords:silicon nitride films