[6p-A503-1~12] 15.7 Crystal evaluation, impurities and crystal defects

[6p-A503-1] Impact of electron dose for analysis on carbon concentration in silicon crystal using photoluminescence spectroscopy after electron irradiation via luminescence activation

〇Satoko Nakagawa¹, Yuta Nagai¹ (1.GWJ)

Keywords:photoluminescence, carbon, electron irradiation