[6p-A503-1~12] 15.7 Crystal evaluation, impurities and crystal defects

[6p-A503-8] Measurement of carbon concentration in silicon crystal(XI)Fabrication of reference sample and block gauge down to 10¹³cm^-3

〇Naohisa Inoue^1,2, Yuichi Kawamura² (1.Tokyo Univ. Agri. & Technol., 2.Osaka Pref. Univ.)

Keywords:silicon crystal, carbon concentration measurement, infrared absorption

Reference samples for infrared absorption measurement of carbon concentration in silicon crystal were fabricated by the electron irradiation according to the request from the leading silicon companies in the world. Substitutional carbon was converted to interstitial carbon. Effective carbon concentration was reduced to 1x10¹³cm^-3 at best. Also, block gauges of carbon concentration upto 2x10¹⁵cm^-3 were fabricated. These samples are practically used in the factories and help to measure carbon concentration down to 1x10¹³ cm^-3 successfully.