[6p-PA8-1~31] 13.8 Compound and power electron devices and process technology

[6p-PA8-30] Fabrication of iridium oxide thick films with p-type conductivity and their electrical properties

〇Shu Takemoto¹, Shinichi Kan¹, Kentaro Kaneko^1,2, Toshimi Hitora², Shizuo Fujita¹ (1.Kyoto Univ., 2.FLOSFIA INC.)

Keywords:iridium oxide, gallium oxide