Effect of Surface Treatment and HPWVA on SiO<sub>2</sub>/n-GaN Interface

Presentation information

Poster presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

Wed. Sep 6, 2017 4:00 PM - 6:00 PM PA8 (P)

4:00 PM - 6:00 PM

〇Takuya Akano¹, Mutsunori Uenuma¹, Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.NAIST)

Keywords:Power Device