The 78th JSAP Autumn Meeting, 2017

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[7a-A413-1~9] 8.1 Plasma production and control

Thu. Sep 7, 2017 9:00 AM - 11:30 AM A413 (413)

Akimitsu Hatta(Kochi Univ. of Tech.)

10:30 AM - 10:45 AM

△ [7a-A413-6] Slow Rotation of Microwave Plasma by Amplitude Modulation

〇(M2)Masaya Hotta1, Daisuke Ogawa1, Keiji Nakamura1, Soonam Park2, Dima Lubomirsky2, Satoru Kobayashi2, Hideo Sugai3 (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

Keywords:microwave plasma, amplitude modulation