Masaya Hotta

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 9:00 AM - 11:30 AM A413 (413)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[7a-A413-1~9] 8.1 Plasma production and control

10:30 AM - 10:45 AM

△ [7a-A413-6] Slow Rotation of Microwave Plasma by Amplitude Modulation

〇(M2)Masaya Hotta¹, Daisuke Ogawa¹, Keiji Nakamura¹, Soonam Park², Dima Lubomirsky², Satoru Kobayashi², Hideo Sugai³ (1.Chubu Univ., 2.Applied Materials, 3.NISRI)

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