The 78th JSAP Autumn Meeting, 2017

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13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)

Takashi Noguchi(Univ. of the Ryukyus), Taizoh Sadoh(Kyushu Univ.)

9:15 AM - 9:30 AM

[7a-C21-2] Effects of Film Thickness on Solid-Phase Crystallization of SiSn/Insulator at Low-Temperature

〇Kazuki Yagi1, Hongmiao Gao2, Takayuki Sugino2, Masanobu Miyao2, Taizo Sadoh2 (1.Kyushu Univ. EECS, 2.Kyushu Univ. ISE)

Keywords:semiconductor, solid-phase crystallization