9:45 AM - 10:00 AM
[7a-C21-4] Effects of Deposition Temperature of Precursors on Solid-Phase Crystallized Si1−xGex Thin Films on an Insulator
Keywords:SiGe, solid phase crystallization
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)
Takashi Noguchi(Univ. of the Ryukyus), Taizoh Sadoh(Kyushu Univ.)