[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

△ [7a-C21-5] Evaluation of Nanostructure in Poly-Si Grain by Raman Spectroscopy (Ⅱ)

〇Takahiro Suzuki¹, Ryo Yokogawa^1,4, Nobuaki Mino¹, Kazuya Takahashi², Katsuhiko Komori², Tamotsu Morimoto³, Naomi Sawamoto¹, Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Electron Tohoku Ltd., 3.Tokyo Electron Ltd., 4.JSPS Research Fellow)

Keywords:nanostructure