11:15 AM - 11:30 AM
[7a-C21-9] Analyses on Residual Thermal Stress in Thermal-Plasma-Jet Crystallized Amorphous Silicon Films on Flexible Glass Substrate
Keywords:Thermal-Plasma-Jet, Flexible Glass
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)
Takashi Noguchi(Univ. of the Ryukyus), Taizoh Sadoh(Kyushu Univ.)