[7a-C23-1~10] 6.4 Thin films and New materials

[7a-C23-6] Preparation of manganese oxides thin films by reactive sputtering and their electrochromic properties

〇(M1)Ryo Kawanami¹, Yoshio Abe¹, Midori Kawamura¹, Kyung Ho Kim¹, Takayuki Kiba¹ (1.Kitami Inst.)

Keywords:manganese oxide thin film, reactive sputtering, electrochromic

The electrochromic (EC) phenomenon is a phenomenon in which a material shows a reversible color change due to electrochemical redox. Manganese oxide is an oxidation colored type EC material, but there are few reports.Therefore, in this study, the manganese oxide thin film was prepared by reactive sputtering, the substrate temperature was changed, and the film structure, composition and EC characteristics were investigated.