The 78th JSAP Autumn Meeting, 2017

Presentation information

Symposium (Oral)

Symposium » Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices

[7p-C13-1~9] Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices

Thu. Sep 7, 2017 1:45 PM - 6:00 PM C13 (office 2-2)

Reo Kometani(Univ. of Tokyo), Hiroshi Mizuta(JAIST), Shinichi Ogawa(AIST)

1:45 PM - 2:00 PM

[7p-C13-1] Welcome to the symposium on recent GFIS / advanced ion source microscopy

Shinichi Ogawa1 (1.AIST)

Keywords:helium ion microscope, gas field ion microscope