The 78th JSAP Autumn Meeting, 2017

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Symposium (Oral)

Symposium » Film Formation and Low Temperature of IV Element Semiconductor

[7p-C18-1~11] Film Formation and Low Temperature of IV Element Semiconductor

Thu. Sep 7, 2017 1:30 PM - 6:30 PM C18 (C18)

Takashi Noguchi(Univ. of the Ryukyus), Naoto Matsuo(Univ. of Hyogo), Seiichiro Higashi(Hiroshima Univ.)

4:00 PM - 4:15 PM

[7p-C18-6] Effect of photonic band gap on flash-lamp-annealing crystallization of a-Ge film

〇(M2)Naoki Yoshioka1, Akira Heya1, Naoto Matsuo1 (1.University of Hyogo)

Keywords:semiconductor, solid phase crystallization

In this study, the diameter dependence of the colmnar Ge film carried out the FLA is examined and the effect of the photonic band gap on the crystallization of a-Ge film is discussed.