4:50 PM - 5:05 PM
△ [7p-C19-8] Electrical Properties of Fine Patterns Fabricated by the Electroless Deposition Process
Keywords:Electroless Deposition Process, Fine Pattern, Wet Process
Presentation information
Symposium (Oral)
Symposium » Challenges for 'multi-scale' processing - dry, wet, or else?...
[7p-C19-1~10] Challenges for 'multi-scale' processing - dry, wet, or else?...
Thu. Sep 7, 2017 1:45 PM - 5:25 PM C19 (C19)
Kazuyoshi Ueno(Shibaura Inst. of Tech), Toshiyuki Sanada(Shizuoka Univ.)