10:00 AM - 10:15 AM
△ [8a-C21-4] Thermal stability of heavily Sb-doped Ge1−xSnx epitaxial layers
Keywords:semiconductor, GeSn, heavily n-type doping
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)
Reo Kometani(Univ. of Tokyo)
10:00 AM - 10:15 AM
Keywords:semiconductor, GeSn, heavily n-type doping