9:15 AM - 9:30 AM
〇(M1)Tatsuhiro Ogawa1, Kotarou Natori1, Takuya Hoshii1, Masashi Nakatake2, Yoshio Watanabe2, Kuniyuki Kakushima1, Hitoshi Wakabayashi1, Kazuo Tsutsui1 (1.Tokyo Tech, 2.Aichi Synchrotron Radiation Center)
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Fri. Sep 8, 2017 9:15 AM - 12:00 PM C21 (C21)
Reo Kometani(Univ. of Tokyo)
△:奨励賞エントリー
▲:英語発表
▼:奨励賞エントリーかつ英語発表
空欄:どちらもなし
9:15 AM - 9:30 AM
〇(M1)Tatsuhiro Ogawa1, Kotarou Natori1, Takuya Hoshii1, Masashi Nakatake2, Yoshio Watanabe2, Kuniyuki Kakushima1, Hitoshi Wakabayashi1, Kazuo Tsutsui1 (1.Tokyo Tech, 2.Aichi Synchrotron Radiation Center)
9:30 AM - 9:45 AM
〇(M2)Ryotaro Kiga1, Masashi Uematsu1,2, Kohei Itoh1,2 (1.Keio Univ., 2.Keio Univ. TCAD Research and Development Center)
9:45 AM - 10:00 AM
〇(D)Yuan Tu1, Yasuo Shimizu1, Masao Inoue2, Yorinobu Kunimune3, Yasuhiro Shimada3, Toshiharu Katayama3, Takashi Ide3, Koji Inoue1, Yasuyoshi Nagai1 (1.IMR, Tohoku Univ., 2.Renesas Electronics Corp., 3.Renesas Semiconductor Manufacturing Co., Ltd.)
10:00 AM - 10:15 AM
〇Jihee Jeon1, Akihiro Suzuki1,2, Kouta Takahashi1,2, Osamu Nakatsuka1,3, Shigeaki Zaima3 (1.Grad. Sch. of Eng., Nagoya Univ.,, 2.Research Fellow of JSPS, 3.IMaSS, Nagoya Univ.)
10:15 AM - 10:30 AM
〇Kazuhiko Fuse1, Hideaki Tanimura1, Takayuki Aoyama1, Shinichi Kato1, Ippei Kobayashi1 (1.SCREEN)
10:30 AM - 10:45 AM
〇Shuichi Noda1, Yosuke Tanimoto2, Takuya Ozaki1, Hideyuki Kurihara2, Yasuyuki Hoshino2, Kazuhiko Endo1,3, Seiji Samukawa1,2 (1.Tohoku Univ., 2.SHOWA DENKO, 3.AIST)
10:45 AM - 11:00 AM
〇(M1)Kenta Kimoto1, Norihisa Takei1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)
11:00 AM - 11:15 AM
〇Ryo Yokogawa1,3, Shuichiro Hashimoto2, Motohiro Tomita1,2,4, Takanobu Watanabe2, Atsushi Ogura1 (1.Meiji Univ., 2.Waseda Univ., 3.JSPS Research Fellow DC, 4.JSPS Research Fellow PD)
11:15 AM - 11:30 AM
〇(M1)Toshiki Nishimoto1, Takashi Nakayama1 (1.Chiba Univ.)
11:30 AM - 11:45 AM
〇Akihiro Suzuki1,2, Osamu Nakatsuka1,3, Mitsuo Sakashita1, Shigeaki Zaima3 (1.Grad. Sch. of Eng., Nagoya Univ., 2.Research Fellow of JSPS, 3.IMaSS, Nagoya Univ.)
11:45 AM - 12:00 PM
〇(M1)Xuan Luo1, Tomonori Nishimura1, Takeaki Yajima1, Akira Toriumi1 (1.The Univ. of Tokyo)
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