[8a-PA2-1~17] 6.4 Thin films and New materials

[8a-PA2-7] Preparation and characterization of the resistor thin film by ELAMOD

〇YUKO UZAWA¹, Iwao Yamaguchi¹, Tomohiko Nakajima¹, Muneyasu Suzuki¹, Tetsuo Tsuchiya¹ (1.AIST)

Keywords:ELAMOD, resistor

Considering the recent global interest in reducing energy consumption, SiC power electronics technology is now ready to enable the step to the next plateau for efficiency standards. In most case, SiC power modules are designed to work at operating temperatures around 250 ^oC. Therefore, a development high heat resistant new electronic component such as resistor is necessary. For this aim, we have developed the resistor thin film on various substrates by ELAMOD