The 78th JSAP Autumn Meeting, 2017

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[8p-A301-1~12] 15.4 III-V-group nitride crystals

Fri. Sep 8, 2017 1:15 PM - 4:30 PM A301 (Main Hall)

Takayuki Nakano(Shizuoka Univ.), Tanikawa Tomoyuki(Tohoku Univ.)

2:15 PM - 2:30 PM

[8p-A301-5] Analysis of the Reaction Process in the Vapor Phase and on the Substrate during GaN MOVPE

〇Kazuki Sekiguchi1, Hiroki Shirakawa1, Kenta Chokawa1, Masaaki Araidai2,1, Yoshihiro Kangawa3,2, Koichi Kakimoto3, Kenji Shiraishi2,1 (1.Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.RIAM, Kyushu Univ.)

Keywords:GaN, MOVPE, Thermodynamic Analyses