The 78th JSAP Autumn Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

Fri. Sep 8, 2017 1:15 PM - 4:00 PM A411 (411)

Koichiro Saga(Sony)

1:30 PM - 1:45 PM

[8p-A411-2] Evaluation of Bulk Lifetime and Surface Recombination Velocity on Si Wafer Using QSSPC Measurements

akira nakayama1, Hiromichi Yoshikawa1, Shota Toyokura1, Koji Amazutsumi1 (1.Kyocera)

Keywords:bulk lifetime, surface recombination velocity, evaluation

Evaluation of bulk lifetime τb and surface recombination velocity S of minority carriers on Si bare wafers is an important task, but the evaluation method has not been sufficiently established. To obtain τb and S on Si bare wafers considering the trapping effect, we examined an evaluating method by QSSPC measurements using comparatively wide short- and long-wavelength irradiation.