[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-3] Influence of Cleanroom Air for Surface Recombination Changing on the
Hydrogen-Terminated Silicon Observed by μ-PCD Lifetime Measurement

〇Nobue Araki^1,2, Hiromi Hidaka¹, Moriya Miyashita¹, Haruhiko Udono² (1.GlobalWafers Japan Co., Ltd., 2.Ibaraki Univ.)

Keywords:surface of silicon wafers, time dependent change